Work Activities
In the NanoXUV research program the team at AMOLF (lead: Femius Koenderink) and the High-Harmonic Generation and EUV Science team at ARCNL (lead: Peter Kraus) develop nanophotonic structures that convert infrared wavelengths to light of very short wavelength, in the UV and even extreme ultraviolet. The need for such a technology comes from the the extreme miniaturisation of micro-electronics, which places extreme demands not just on nanofabrication, but also on inspection methods that visualize the manufactured devices. While optical inspection methods have the advantage of being fast and non-destructive, they typically face the challenge that features that are to be resolved are much smaller than the diffraction limit associated with the usual visible or infrared wavelengths. In this program we envision optical metasurfaces pumped by femtosecond infrared pulses that emit XUV light for metrology.
How do you design optical metasurfaces that efficien...